Effect of deposition temperature on polymorphous silicon thin films by PECVD: Role of hydrogen

  • L. Hamui
  • , B. M. Monroy
  • , K. H. Kim
  • , A. López-Suárez
  • , J. Santoyo-Salazar
  • , M. López-López
  • , P. Roca I Cabarrocas
  • , G. Santana*
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

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Engineering

Material Science